EFFECT OF RAPID THERMAL ANNEALING TREATMENT ON THE ELECTRICAL CONDUCTIVITY OF NANOCRYSTALLINE ZINC OXIDE DOPED WITH ALUMINUM
Effect of Rapid Thermal Annealing on Conductivity of AZO
DOI:
https://doi.org/10.55766/sujst9269Keywords:
AZO, Rapid thermal annealing, Electron transport layer, Conductive improvement, Spherical nanocrystalline zinc oxideAbstract
Spherical nanocrystalline aluminum-doped zinc oxide (nc-AZO) has shown an improvement in conductivity and optical properties under rapid thermal annealing (RTA) treatment. The typical treatment at 500℃ for 1 h. on nc-AZO provides low electrical conductivity and low photocurrent, whereas RTA treatment performs better properties with above 85% optical transmittance and higher electrical conductivity. The diameter size of nano-spherical nc-AZO is around at 10-30 nm providing the energy band gap between 3.2 eV and 3.4 eV. Thus, the high electrical and optical qualities of such nc-AZO films can be required for an electron transport layer and transparent contact electrodes for semiconductor devices.
References
Bose, S., Mandal, S., Barua, A.K., and Mukhopadhyay, S. (2020). Properties of boron doped ZnO films prepared by reactive sputtering method: Application to amorphous silicon thin film solar cells. Journal of Materials Science & Technology, 55:136-143. https://doi.org/10.1016/j.jmst.2019.12.004
Choe, S.-H., Kim, Y.-S., Choi, J.-Y., Park, Y.-J., Cha, B.-C., Kong, Y.-M., and Kim, D. (2019). Effects of Rapid Thermal Annealing on the Structural, Optical, and Electrical Properties of ZnO/Ag/SnO2 Tri-Layer Films. Korean Journal of Metals and Materials, 57(8):506-509. https://doi.org/10.3365/KJMM.2019.57.8.506
Constantinescu, C., Matei, A., Ionita, I., Ion, V., Marascu, V., Dinescu, M., Vasiliu, C., and Emandi, A. (2014). Azo-derivatives thin films grown by matrix-assisted pulsed laser evaporation for non-linear optical applications. Applied Surface Science, 302:69-73. https://doi.org/10.1016/j.apsusc.2013.12.068
Daza, L.G., Perez-Quintana, I.V., Cruz-Muñoz, B., Herrera-Salvador, M., and Castro-Rodríguez, R. (2021). Twisted-motion substrate with sustained azimuthal rotation effect on the growth of AZO thin films by rf-sputtering. Optik, 234:166561. https://doi.org/10.1016/j.ijleo.2021.166561
Dev, S., Kumar, P., Rani, A., Agarwal, A., and Dhar, R. (2020). Development of indium doped ZnO thin films for highly sensitive acetylene (C2H2) gas sensing. Superlattices and Microstructures, 145:106638. https://doi.org/10.1016/j.spmi.2020.106638
Efafi, B., Sasani Ghamsari, M., and Majles Ara, M.H. (2014). Sol–gel derived AZO thin film with unusual narrow dual emission. Journal of Luminescence, 154:32-35. https://doi.org/10.1016/j.jlumin.2014.03.062
Fangsuwannarak, T., Laohawiroj, S., Rattanawichai, P., Mekmork, K., Limsiri, W., and Phatthanakun, R. (2021). Silicon dots films deposited by spin-coating as a generated carrier addition layer of third generation photovoltaics. Progress in Natural Science: Materials International, 31(2):192-200. https://doi.org/10.1016/j.pnsc.2020.11.008
Fangsuwannarak, T., Rattanawichai, P., Laohawiroj, S., Limsiri, W., Naidoo, N.J., Phatthanakun, R., and Fangsuwannarak, K. (2022). Conductivity Improvement of Spherical Nano-Crystalline ZnO:Bi/Indium Tin Oxide Layer for Low Cost of Semiconductor Devices. Integrated Ferroelectrics, 222(1):14-27. https://doi.org/10.1080/10584587.2021.1961512
Gadallah, A.-S., and El-Nahass, M.M. (2013). Structural, optical constants and photoluminescence of ZnO thin films grown by sol-gel spin coating. Advances in Condensed Matter Physics, 2013(1):234546. https://doi.org/10.1155/2013/234546
Ghosh, R., Basak, D., and Fujihara, S. (2004). Effect of substrate-induced strain on the structural, electrical, and optical properties of polycrystalline ZnO thin films. Journal of Applied Physics, 96(5):2,689-2,692. https://doi.org/10.1063/1.1769598
Hao, H.L., Wu, L.K., Chung, W.J., Zhang, Y., and Shen, W.Z. (2015). Process optimization of RTA on the characteristics of ITO-coated GaN-based LEDs. Microelectronics Reliability, 55(11):2,263-2,268. https://doi.org/10.1016/j.microrel.2015.07.043
Hu, S.Y., Lee, Y.C., Lee, J.W., Huang, J.C., Shen, J.L., and Water, W. (2008). The structural and optical properties of ZnO/Si thin films by RTA treatments. Applied Surface Science, 254(6):1,578-1,582. https://doi.org/10.1016/j.apsusc.2007.07.134
Hwang, Y.J., Boukai, A., and Yang, P. (2009). High density n-Si/n-TiO2 core/shell nanowire arrays with enhanced photoactivity. Nano Lett., 9(1):410-415. https://doi.org/10.1021/nl8032763
Islam, M.R., Rahman, M., Farhad, S.F.U., and Podder, J. (2019). Structural, optical and photocatalysis properties of sol–gel deposited Al-doped ZnO thin films. Surfaces and Interfaces, 16:120-126. https://doi.org/10.1016/j.surfin.2019.05.007
Khan, M.I., Neha, T.R., and Billah, M.M. (2022). UV-irradiated sol-gel spin coated AZO thin films: enhanced optoelectronic properties. Heliyon, 8(1):e08743. https://doi.org/10.1016/j.heliyon.2022.e08743
Krongarrom, P., Rattanachan, S.T., and Fangsuwannarak, T. (2012). ZnO Doped with Bismuth in Case of In-Phase Behavior for Solar Cell Application. Engineering. Journal, 16(3):59-70. https://doi.org/10.4186/ej.2012.16.3.59
Lan, J.-L., Cherng, S.-J., Yang, Y.-H., Zhang, Q., Subramaniyan, S., Ohuchi, F.S., Jenekhe, S.A., and Cao, G. (2014). The effects of Ta2O5–ZnO films as cathodic buffer layers in inverted polymer solar cells. Journal of Materials Chemistry A, 2(24):9,361-9,370. https://doi.org/10.1039/C4TA01350F
Mahesh, D. and Kumar, M.C.S. (2020). Synergetic effects of aluminium and indium dopants in the physical properties of ZnO thin films via spray pyrolysis. Superlattices and Microstructures, 142:106511. https://doi.org/10.1016/j.spmi.2020.106511
Mohamedi, M., Challali, F., Touam, T., Mendil, D., Ouhenia, S., Souici, A.H., Djouadi, D., and Chelouche, A. (2022). Role of substrate and annealing on microstructural, optoelectronic and luminescence properties of RF magnetron sputtered AZO thin films in confocal configuration. Journal of Luminescence, 244:118739. https://doi.org/10.1016/j.jlumin.2022.118739
Mohammed, K.I., Jasim, F.M., and Azawe, M.I. (2014). Influence of thickness and crystalline structure on thermal and optical properties of ZnO thin films. Current Applied Physics, 14(9):1,318-1,324. https://doi.org/10.1016/j.cap.2014.07.007
Nasiri, M. and Rozati, S.M. (2018). Muscovite mica as a flexible substrate for transparent conductive AZO thin films deposited by spray pyrolysis. Materials Science in Semiconductor Processing, 81:38-43. https://doi.org/10.1016/j.mssp.2018.03.009
Nicolescu, M., Anastasescu, M., Preda, S., Calderon-Moreno, J., Stroescu, H., Gartner, M., Teodorescu, V., Maraloiu, V.-A., Kampylafka, V., Aperathitis, E., and Modreanu, M. (2010). Surface topography and optical properties of nitrogen doped ZnO thin films formed by radio frequency magnetron sputtering on fused silica substrates. Journal of Optoelectronics and Advanced Materials, 12(6):1,343-1,349.
Ning, H., Xie, H., Zhao, Q., Liu, J., Tian, W., Wang, Y., and Wu, M. (2017). Electrospinning ZnO/carbon nanofiber as binder-free and self-supported anode for Li-ion batteries. Journal of Alloys and Compounds, 722:716-720. https://doi.org/10.1016/j.jallcom.2017.06.099
Optical Characterization (2005). Semiconductor Material and Device Characterization, pp. 563-626. https://doi.org/10.1002/0471749095.ch10
Pankove, J.I., and Kiewit, D.A. (1972). Optical Processes in Semiconductors. Journal of The Electrochemical Society, 119(5):156C. https://doi.org/10.1149/1.2404256
Peng, S., Yao, T., Yang, Y., Zhang, K., Jiang, J., Jin, K., Li, G., Cao, X., Xu, G., and Wang, Y. (2016). Influences of the RF power ratio on the optical and electrical properties of GZO thin films by DC coupled RF magnetron sputtering at room temperature. Physica B Condens. Matter, 503:111-116. https://doi.org/10.1016/j.physb.2016.09.027
Ponja, S.D., Sathasivam, S., Parkin, I.P., and Carmalt, C.J. (2020). Highly conductive and transparent gallium doped zinc oxide thin films via chemical vapor deposition. Scientific Reports, 10(1):638. https://doi.org/10.1038/s41598-020-57532-7
Rajesh, Y., Mohiddon, M.A., and Krishna, M.G. (2022). Shape evolution and optical response of ZnO nanostructures grown on thermally evaporated ZnO and Au thin films. Materials Chemistry and Physics, 277:125448. https://doi.org/10.1016/j.matchemphys.2021.125448
Randeniya, L.K., Bendavid, A., Martin, P.J., and Preston, E.W. (2007). Photoelectrochemical and structural properties of TiO2 and N-doped TiO2 thin films synthesized using pulsed direct current plasma-activated chemical vapor deposition. The Journal of Physical Chemistry C, 111(49):18334-18340. https://doi.org/10.1021/jp075938u
Rattanawichai, P., Fangsuwannarak, T., Fangsuwannarak, K., Laohawiroj, S., Limsiri, W., Naidoo, N.J., and Phatthanakun, R. (2022). Effect of rapid thermal treatment on the electrical conductivity improvement of nc-ZnO:Bi thin film and ITO substrate. Ferroelectrics, 586(1):160-177. https://doi.org/10.1080/00150193.2021.2014268
Rattanawichai, P., Fangsuwannarak, T., Phatthanakun, R., and Rattanachan, S.T. (2018). High Photocurrent Gain of Spherical Nano-crystalline ZnO:Bi Film for Advanced Solar Cells Application. Chiang Mai Journal of Science, 45(5):1,995-2,004.
Salam, S., Islam, M., and Akram, A. (2013). Sol–gel synthesis of intrinsic and aluminum-doped zinc oxide thin films as transparent conducting oxides for thin film solar cells. Thin Solid Films, 529:242-247. https://doi.org/10.1016/j.tsf.2012.10.079
Samoei, V.K., and Jayatissa, A.H. (2020). Aluminum doped zinc oxide (AZO)-based pressure sensor. Sensors and Actuators A: Physical, 303:111816. https://doi.org/10.1016/j.sna.2019.111816
Schoenhalz, A.L., Arantes, J.T., Fazzio, A., and Dalpian, G.M. (2010). Surface and quantum confinement effects in ZnO nanocrystals. J. Phys. Chem. C, 114(43): 18293-18297.
Shan, F.K., Liu, G.X., Lee, W.J., Shin, B.C., and Kim, K.H. (2008). Structural, electrical, and optical properties of germanium-doped ZnO thin films deposited by pulsed laser deposition technique. Integrated Ferroelectrics, 98(1):199-207. https://doi.org/10.1080/10584580802096127
Shi, Q., Lin, S., Wei, C., Li, H., Guo, C., Su, Y., Fang, H., and Dai, M. (2019). Electrochemical and optoelectric behavior of Al-doped ZnO films as transparent anode for Li-ion batteries. Materials Today Communications, 19:471-475. https://doi.org/10.1016/j.mtcomm.2019.05.011
Thambidurai, M., Kim, J.Y., Song, J., Ko, Y., Muthukumarasamy, N., Velauthapillai, D., and Lee, C. (2014). Nanocrystalline Ga-doped ZnO thin films for inverted polymer solar cells. Solar Energy, 106:95-101. https://doi.org/10.1016/j.solener.2013.12.009
Wan, Z., Kwack, W.-S., Lee, W.-J., Jang, S., II, Kim, H.-R., Kim, J.-W., Jung, K.-W., Min, W.-J., Yu, K.-S., Park, S.-H., Yun, E.-Y., Kim, J.-H., and Kwon, S.-H. (2014). Electrical and optical properties of Ti doped ZnO films grown on glass substrate by atomic layer deposition. Materials Research Bulletin, 57:23-28. https://doi.org/10.1016/j.materresbull.2014.04.070
Wang, Y., Tang, W., Zhang, L., and Zhao, J. (2014). Electron concentration dependence of optical band gap shift in Ga-doped ZnO thin films by magnetron sputtering. Thin Solid Films, 565:62-68. https://doi.org/10.1016/j.tsf.2014.06.046
Xia, Y., Wang, P., Shi, S., Zhang, M., He, G., Lv, J., and Sun, Z. (2017). Deposition and characterization of AZO thin films on flexible glass substrates using DC magnetron sputtering technique. Ceramics International, 43(5):4,536-4,544. https://doi.org/10.1016/j.ceramint.2016.12.106
Yan, X., Li, W., Aberle, A.G., and Venkataraj, S. (2016). Textured AZO for Thin-Film Si Solar Cells: Towards Understanding the Effect of AZO Film Thickness on the Surface Texturing Properties. Procedia Engineering, 139:134-139. https://doi.org/10.1016/j.proeng.2015.09.214
Yang, Z., Zhang, T., Li, J., Xue, W., Han, C., Cheng, Y., Qian, L., Cao, W., Yang, Y., and Chen, S. (2017). Multiple electron transporting layers and their excellent properties based on organic solar cell. Scientific Reports, 7(1):9571. https://doi.org/10.1038/s41598-017-08613-7
Yang, Z.-P., Xie, Z.-H., Lin, C.-C., and Lee, Y.-J. (2015). Slanted n-ZnO nanorod arrays/p-GaN light-emitting diodes with strong ultraviolet emissions. Opt. Mater. Express, 5(2):399-407. https://doi.org/10.1364/OME.5.000399
Zhao, X., Shen, H., Zhang, Y., Li, X., Zhao, X., Tai, M., Li, J., Li, J., Li, X., and Lin, H. (2016). Aluminum-Doped Zinc Oxide as Highly Stable Electron Collection Layer for Perovskite Solar Cells. ACS Applied Materials & Interfaces, 8(12):7,826-7,833. https://doi.org/10.1021/acsami.6b00520
Zhu, S.-B., Geng, Y., Lu, H.-L., Zhang, Y., Sun, Q.-Q., Ding, S.-J., and Zhang, D.W. (2013). Effects of rapid thermal annealing on Hf-doped ZnO films grown by atomic layer deposition. J. Alloys Compd., 577:340-344. https://doi.org/10.1016/j.jallcom.2013.05.181
