DEPOSITION AND PHASE TRANSFORMATION OF SILVER ANTIMONY TELLURIDE THIN FILMS BY DC MAGNETRON SPUTTERING
Keywords:
Key physical characteristics’ factors, freight transportation routing, Delphi method, fuzzy analytic hierarchy processAbstract
Ternary silver antimony telluride (Ag-Sb-Te) thin films on glass substrates were completely deposited by DC magnetron sputtering. We proposed the good DC magnetron sputtering the base pressure and work pressure at 3×10–5 Torr and 2.6×10–2 Torr, respectively and the Ar atmosphere flow at rate of 30 sccm and sputtering power of 40 W. Moreover, we can have annealed thin films at the temperature range 300 to 500°C under Ar atmosphere for 30 min for study phase transformation. It was found that, the thin films show phase transformation from amorphous to cubic structure of Sb7Te and AgSbTe2 when increased annealing temperature. The crystal structure, crystallite size, lattice strains, lattice parameters and the peak intensity ratio of the (2 2 0) peak with the sum of all the peak, Σ(h k l) are analyzed.
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