Aiempanakit, K.; Aiempanakit, M.; Rukkun, J.; Reakaukot, P.; Wongpisan, W.; Waree, K. STRUCTURAL AND MECHANICAL PROPERTIES OF TiAlN AND TiAlN GRADIENT FILMS DEPOSITED BY REACTIVE PULSED DC MAGNETRON SPUTTERING. Suranaree J Sci Technol 2023, 30, 010205(1-6).