Phae-ngam W, Prathumsit J, Gitgeatpong G, Chaikeeree T, Bodinthitikul N, Lertvanithphol T, Horprathum M, Jutarosaga T. High-rate Deposition of Crystalline TiHfN Ultra-thin Films by Closed-field Dual-cathode DC Unbalanced Reactive Magnetron Sputtering without External Substrate Heating. J. Curr. Sci. Technol. [internet]. 2024 Sep. 1 [cited 2025 Jul. 29];14(3):Article 48. available from: https://ph04.tci-thaijo.org/index.php/JCST/article/view/3478