Phae-ngam, W. ., Prathumsit, J., Gitgeatpong, G. ., Chaikeeree, T. ., Bodinthitikul, N. ., Lertvanithphol, T. ., Horprathum, M. . and Jutarosaga, T. . (2024) “High-rate Deposition of Crystalline TiHfN Ultra-thin Films by Closed-field Dual-cathode DC Unbalanced Reactive Magnetron Sputtering without External Substrate Heating”, Journal of Current Science and Technology, 14(3), p. Article 48. doi: 10.59796/jcst.V14N3.2024.48.