Phae-ngam, W. , Prathumsit, J., Gitgeatpong, G. , Chaikeeree, T. , Bodinthitikul, N. , Lertvanithphol, T. , Horprathum, M. and Jutarosaga, T. 2024. High-rate Deposition of Crystalline TiHfN Ultra-thin Films by Closed-field Dual-cathode DC Unbalanced Reactive Magnetron Sputtering without External Substrate Heating. Journal of Current Science and Technology. 14, 3 (Sep. 2024), Article 48. DOI:https://doi.org/10.59796/jcst.V14N3.2024.48.